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  1. 05 工学研究院・理工学府・理工学部
  2. 5-1 学術雑誌論文

Density profile transition and high-energy electron transport in a magnetically expanding radio frequency plasma

http://hdl.handle.net/10131/00014926
http://hdl.handle.net/10131/00014926
13f350db-84f4-4515-8de7-df7dff334ff9
名前 / ファイル ライセンス アクション
POP22-AR-01361.pdf POP22-AR-01361.pdf (6.1 MB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2023-01-26
タイトル
タイトル Density profile transition and high-energy electron transport in a magnetically expanding radio frequency plasma
言語 en
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
著者 Emoto, Kazuma

× Emoto, Kazuma

ORCID 0000-0002-1624-4646

en Emoto, Kazuma
Div Syst Res, Yokohama National University
Div Syst Res, Japan Society for the Promotion of Science

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Takahashi, Kazunori

× Takahashi, Kazunori

ORCID 0000-0001-5690-1893

en Takahashi, Kazunori
Div Syst Res, Dept Elect Engn, Tohoku University

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Takao, Yoshinori

× Takao, Yoshinori

ORCID 0000-0002-3468-8857

en Takao, Yoshinori
Div Syst Res, Yokohama National University

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抄録
内容記述タイプ Abstract
内容記述 The density profile transition and high-energy electron transport in a magnetically expanding radio frequency (RF) plasma were investigated using particle-in-cell and Monte Carlo collision techniques, where both the plasma source and the diffusion region were simulated self-consistently. The simulation results show that the density profile changes from center-peaked to bimodal plasma with increasing magnetic field strength, where bimodal plasma was observed in previous experiments. Then, the density profile transition is discussed with respect to ionization, electron temperature, and high-energy electron density. This indicates that electrons were heated by the RF field and transported radially inward across magnetic field lines. The moving distance of high-energy electrons is explained by an electron-neutral elastic collision. Therefore, the density formation depends on where the electrons are heated and how far the high-energy electrons are transported by an elastic collision, implying the longer existing time of high-energy electrons that move radially inward away from the RF antenna.
言語 en
書誌情報 en : Physics of Plasmas

巻 30, 号 1, ページ数 10, 発行日 2023-01-01
ISSN
収録物識別子タイプ PISSN
収録物識別子 1070664X
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1063/5.0126901
権利
言語 en
権利情報Resource https://publishing.aip.org/resources/researchers/rights-and-permissions/sharing-content-online/
権利情報 This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in "Physics of Plasmas" and may be found at https://doi.org/10.1063/5.0126901
著者版フラグ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
出版者
出版者 AIP Publishing
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