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Silicon epitaxial growth accelerated by parallel Langmuir processes using SiH2Cl2 and SiH3CH3 gases
http://hdl.handle.net/10131/00012489
http://hdl.handle.net/10131/00012489220f3e9b-8af5-441d-8942-a69c79c82c40
名前 / ファイル | ライセンス | アクション |
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3 (153.7 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2019-05-22 | |||||
タイトル | ||||||
タイトル | Silicon epitaxial growth accelerated by parallel Langmuir processes using SiH2Cl2 and SiH3CH3 gases | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題 | Silicon epitaxial growth, parallel Langmuir processes, dichlorosilane, silicon hydrides | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Yamada, Ayami
× Yamada, Ayami× Muroi, Mitsuko× Watanabe, Toru× Saito, Ayumi× Sakurai, Ayumi× Habuka, Hitoshi |
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著者所属 | ||||||
Department of Chemistry Applications and Life Science, Yokohama National University | ||||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | The silicon epitaxial growth behaviour was studied as an application of the parallel-Langmuir process using SiH2Cl2 gas and SiH3CH3 gas. The SiH3CH3 gas was used for producing the SiH x gas in situ by thermal decomposition in the reactor. With the increasing gas concentration of SiH3CH3, several results were obtained: (i) the silicon epitaxial growth rate increased exceeding the value saturated using the SiH2Cl2, (ii) the gas phase concentrations of the chlorosilanes at the exhaust decreased, (iii) the byproduct deposition at the exhaust decreased, and (iv) the gas phase concentration of HCl at the exhaust decreased. We conclude that the SiHx helped consume the SiH2Cl2 gas for the production of a silicon epitaxial film with reductions in the byproduct deposition. Additionally, SiHx might produce SiH2Cl2 in the gas phase by reaction with HCl gas. | |||||
書誌情報 |
Semiconductor science and technology 巻 33, 号 9, 発行日 2018-07-26 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 02681242 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10695094 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1088/1361-6641/aad294 | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
出版者 | ||||||
出版者 | IOP Science |