WEKO3
アイテム
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Effect of capacitive coupling in a miniature inductively coupled plasma source
http://hdl.handle.net/10131/9079
http://hdl.handle.net/10131/9079c53461e4-64c4-4a4e-b8c2-7d41023abe39
名前 / ファイル | ライセンス | アクション |
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JAPIAU_112_9_093306_1.pdf (2.1 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2015-03-10 | |||||
タイトル | ||||||
タイトル | Effect of capacitive coupling in a miniature inductively coupled plasma source | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Takao, Yoshinori
× Takao, Yoshinori× Eriguchi, Koji× Ono, Kouichi |
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著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 714 | |||||
識別子Scheme | e-Rad | |||||
識別子URI | https://kaken.nii.ac.jp/ja/search/?qm=80552661 | |||||
識別子 | 80552661 | |||||
姓名 | タカオ, ヨシノリ | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19458 | |||||
姓名 | エリグチ, コウジ | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19459 | |||||
姓名 | オノ, コウイチ | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 714 | |||||
識別子Scheme | e-Rad | |||||
識別子URI | https://kaken.nii.ac.jp/ja/search/?qm=80552661 | |||||
識別子 | 80552661 | |||||
姓名 | 鷹尾, 祥典 | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19461 | |||||
姓名 | 江利口, 浩二 | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19462 | |||||
姓名 | 斧, 髙一 | |||||
著者所属 | ||||||
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University | ||||||
著者所属 | ||||||
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University | ||||||
著者所属 | ||||||
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University | ||||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Two-dimensional axisymmetric particle-in-cell simulations with a Monte Carlo collision algorithm (PIC-MCC) have been conducted to investigate the effect of capacitive coupling in a miniature inductively coupled plasmasource (mICP) by using two models: an inductive model and a hybrid model. The mICP is 3 mm in radius and 6 mm in height with a three-turn planar coil, where argon plasma is sustained. In the inductive model, the coil is assumed to be electrostatically shielded, and thus the discharge is purely inductive coupling. In the hybrid model, we assume that the different turns of the coil act like electrodes in capacitive discharge to include the effect of capacitive coupling. The voltage applied to these electrodes decreases linearly from the powered end of the coil towards the grounded end. The numerical analysis has been performed for rf frequencies in the range of 100-1000 MHz, and the power absorbed by the plasma in the range of 5-50 mW at a fixed pressure of 500 mTorr. The PIC-MCC results show that potential oscillations at the plasma-dielectric interface are not negligible, and thus the major component of the absorbed power is caused by the axial motion of electrons in the hybrid model, although almost all of the power absorption is due to the azimuthal motion of electrons in the inductive model. The effect of capacitive coupling is more significant at lower rf frequencies and at higher absorbed powers under the calculation conditions examined. Moreover, much less coil currents are required in the hybrid model. | |||||
書誌情報 |
Journal of Applied Physics 巻 112, 号 9, p. 093306-1-093306-10, 発行日 2012-11-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00218979 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00693547 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |