@article{oai:ynu.repo.nii.ac.jp:00004255, author = {Mukai, Kohki and Yoshimura, Toshiya and Maruo, Shoji}, issue = {4B}, journal = {Japanese journal of applied physics. Pt. 1, Regular papers & short not}, month = {}, note = {application/pdf, A novel microfabrication process for three-dimensional metal microstructures was proposed. The process consists of four steps: the fabrication of a resin mold by photopolymerization, the electroless plating of the mold, the electrolytic grinding to expose a metal inside the mold, and the extraction of the structure. We experimentally demonstrated the molding process. The epoxy resin suitable for polymerization via a two-photon absorption reaction was successfully plated using a nickel metal. The lattice distortion of the plated metal was found to be reduced by decreasing the pH of plate solution, which was revealed by X-ray diffraction measurement. We replicated the shape of a rice grain with nickel by immersing the plated polymer mold in acetone for extraction. X-ray fluorescence measurements indicated the high purity of the nickel replica.}, pages = {2761--2763}, title = {Micromolding of three-dimensional metal structures by electroless plating of photopolymerized resin}, volume = {46}, year = {2007} }