@article{oai:ynu.repo.nii.ac.jp:00004242, author = {Mukai, Kohki and Kitayama, Shinya and Yoshimura, Toshiya and Maruo, Shoji}, issue = {4}, journal = {Japanese Journal of Applied Physics}, month = {}, note = {application/pdf, The electroless plating of ferrite and copper onto photopolymerized resin was investigated with the aim of fabricating three-dimensional microstructures. Evaluation by X-ray diffraction and X-ray fluorescence measurements clarified that the materials were successfully plated onto the resin mold by controlling the temperature and pH of the source solution. High-resolution optical microscope observation revealed that the 2-μm-deep pits at the surface were fully plated by the materials, demonstrating the submicron resolution of the microfabrication process. We performed the transcription of three-dimensional structures made of plated copper from a resin mold, and succeeded in the fabrication of a screw. The 40-μm-thick thread was formed accurately.}, pages = {3232--3235}, title = {Ferrite and copper electroless plating of photopolymerized resin for micromolding of three-dimensional structures}, volume = {47}, year = {2008} }