@article{oai:ynu.repo.nii.ac.jp:00003694,
 author = {Maruo, Shoji and Inoue, H.},
 issue = {14},
 journal = {Applied Physics Letters},
 month = {Oct},
 note = {application/pdf, An optically driven lobed micropump was developed using three-dimensional two-photon microfabrication. The two built-in rotors, 9 mu m in diameter, are cooperatively driven by means of time-divided scanning of a single laser beam. It was demonstrated that a tracer particle was moved by simultaneously rotating the two rotors. The velocity of the tracer particle was proportional to the rotation speed of the rotors in the range of 0.2-0.7 mu m/s. The flow rate was estimated to be sub-pL/min level. This ultralow flow rate will be useful for further integration and miniaturization of micro-total-analysis systems. (c) 2006 American Institute of Physics.},
 title = {Optically driven micropump produced by three-dimensional two-photon microfabrication},
 volume = {89},
 year = {2006}
}