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Micromolding for three-dimensional metal microstructures using stereolithography of photopolymerized resin
http://hdl.handle.net/10131/8145
http://hdl.handle.net/10131/8145049a9941-1b17-45d2-b200-cf7f48505985
名前 / ファイル | ライセンス | アクション |
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09pMukai_MEEr.pdf (798.4 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2012-09-14 | |||||
タイトル | ||||||
タイトル | Micromolding for three-dimensional metal microstructures using stereolithography of photopolymerized resin | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題 | micromolding, microstructure, photopolymerized resin;, stereolithography, micromachine | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Mukai, Kohki
× Mukai, Kohki× Kitayama, hinya× Kawajiri, Yasunobu× Maruo, Shoji |
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著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19912 | |||||
姓名 | ムカイ, コウキ | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19913 | |||||
姓名 | キタヤマ, シンヤ | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19914 | |||||
姓名 | カワジリ, ヤスノブ | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19915 | |||||
姓名 | マルオ, ショウジ | |||||
著者所属 | ||||||
Department of Mechanical Engineering and Materials Science,Yokohama National University | ||||||
著者所属 | ||||||
Department of Mechanical Engineering and Materials Science,Yokohama National University,Yokohama National University, | ||||||
著者所属 | ||||||
Department of Mechanical Engineering and Materials Scice,Yokohama National University, | ||||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | If micromachines can be produced with metal microstructures, their application field will be greatly expanded. We have proposed a metal micromolding method based on the stereolithography of photopolymerized resin. In this work, we report our recent successful development of three fundamental processes used in the micromolding method. The electroless plating of palladium with a purity of 93 - 97% was realized on photopolymerized resin with a view to realizing a shape memory alloy. An electrolytic grinding technique was examined for copper, and step-by-step grinding was realized for the first time using a NaCl solution. A copper replica was successfully extracted from a resin mold by using heat treatment. The results suggested that three-dimensional metal microstructures can be produced with micrometer order accuracy by using the micromolding method. | |||||
書誌情報 |
Microelectronic engineering. 巻 86, 号 4-6, p. 1169-1172, 発行日 2009 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 01679317 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA10693521 | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa |