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Molecular dynamics simulations of Si etching in Cl- and Br-based plasmas : Cl+ and Br+ ion incidence in the presence of Cl and Br neutrals
http://hdl.handle.net/10131/9401
http://hdl.handle.net/10131/9401d906d9b8-d664-48bc-9394-464b6d07409f
名前 / ファイル | ライセンス | アクション |
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1_4937449.pdf (8.5 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2015-12-22 | |||||
タイトル | ||||||
タイトル | Molecular dynamics simulations of Si etching in Cl- and Br-based plasmas : Cl+ and Br+ ion incidence in the presence of Cl and Br neutrals | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Nakazaki, Nobuya
× Nakazaki, Nobuya× Takao, Yoshinori× Eriguchi, Koji× Ono, Kouichi |
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著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19661 | |||||
姓名 | ナカザキ, ノブヤ | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 714 | |||||
識別子Scheme | e-Rad | |||||
識別子URI | https://kaken.nii.ac.jp/ja/search/?qm=80552661 | |||||
識別子 | 80552661 | |||||
姓名 | タカオ, ヨシノリ | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19663 | |||||
姓名 | エリグチ, コウジ | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19664 | |||||
姓名 | オノ, コウイチ | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19665 | |||||
姓名 | 中崎, 暢也 | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 714 | |||||
識別子Scheme | e-Rad | |||||
識別子URI | https://kaken.nii.ac.jp/ja/search/?qm=80552661 | |||||
識別子 | 80552661 | |||||
姓名 | 鷹尾, 祥典 | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19667 | |||||
姓名 | 江利口, 浩二 | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19668 | |||||
姓名 | 斧, 高一 | |||||
著者所属 | ||||||
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University | ||||||
著者所属 | ||||||
Division of Systems Research, Faculty of Engineering, Yokohama National University | ||||||
著者所属 | ||||||
Propulsion Engineering Lab(Kouichi Ono Group), Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University | ||||||
著者所属 | ||||||
Propulsion Engineering Lab(Kouichi Ono Group), Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University | ||||||
書誌情報 |
Journal of applied physics 巻 118, 号 23, p. 233304-1-233304-18, 発行日 2015-12-18 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00218979 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00693547 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1063/1.4937449 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |