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Two-dimensional particle-in-cell Monte Carlo simulation of a miniature inductively coupled plasma source
http://hdl.handle.net/10131/9080
http://hdl.handle.net/10131/9080e90fceb6-b42e-4952-afa8-d748706804a3
名前 / ファイル | ライセンス | アクション |
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JAPIAU1089093309_1.pdf (893.0 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2015-03-10 | |||||
タイトル | ||||||
タイトル | Two-dimensional particle-in-cell Monte Carlo simulation of a miniature inductively coupled plasma source | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Takao, Yoshinori
× Takao, Yoshinori× Kusaba, Naoki× Eriguchi, Koji× Ono, Kouichi |
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著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 714 | |||||
識別子Scheme | e-Rad | |||||
識別子URI | https://kaken.nii.ac.jp/ja/search/?qm=80552661 | |||||
識別子 | 80552661 | |||||
姓名 | タカオ, ヨシノリ | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19468 | |||||
姓名 | クサバ, ナオキ | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19469 | |||||
姓名 | エリグチ, コウジ | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19470 | |||||
姓名 | オノ, コウイチ | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 714 | |||||
識別子Scheme | e-Rad | |||||
識別子URI | https://kaken.nii.ac.jp/ja/search/?qm=80552661 | |||||
識別子 | 80552661 | |||||
姓名 | 鷹尾, 祥典 | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19472 | |||||
姓名 | 草場, 尚喜 | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19473 | |||||
姓名 | 江利口, 浩二 | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19474 | |||||
姓名 | 斧, 髙一 | |||||
著者所属 | ||||||
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University | ||||||
著者所属 | ||||||
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University | ||||||
著者所属 | ||||||
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University | ||||||
著者所属 | ||||||
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University | ||||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Two-dimensional axisymmetric particle-in-cell simulations with Monte Carlo collision calculations (PIC-MCC) have been conducted to investigate argon microplasma characteristics of a miniature inductively coupled plasmasource with a 5-mm-diameter planar coil, where the radius and length are 5 mm and 6 mm, respectively. Coupling the rf-electromagnetic fields to the plasma is carried out based on a collisional model and a kinetic model. The former employs the cold-electron approximation and the latter incorporates warm-electron effects. The numerical analysis has been performed for pressures in the range 370-770 mTorr and at 450 MHz rf powers below 3.5 W, and then the PIC-MCC results are compared with available experimental data and fluid simulation results. The results show that a considerably thick sheath structure can be seen compared with the plasma reactor size and the electron energy distribution is non-Maxwellian over the entire plasma region. As a result, the distribution of the electron temperature is quite different from that obtained in the fluid model. The electron temperature as a function of rf power is in a reasonable agreement with experimental data. The pressure dependence of the plasma density shows different tendency between the collisional and kinetic model, implying noncollisional effects even at high pressures due to the high rf frequency, where the electron collision frequency is less than the rf driving frequency. | |||||
書誌情報 |
Journal of Applied Physics 巻 108, 号 9, p. 093309-1-093309-8, 発行日 2010-11-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00218979 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00693547 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |