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Particle Simulations of Sheath Dynamics in Low-Pressure Capacitively Coupled Argon Plasma Discharges
http://hdl.handle.net/10131/9069
http://hdl.handle.net/10131/9069b78e6e62-36ac-4eea-aac3-d78453a520b2
名前 / ファイル | ライセンス | アクション |
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PP10032.pdf (706.0 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2015-03-10 | |||||
タイトル | ||||||
タイトル | Particle Simulations of Sheath Dynamics in Low-Pressure Capacitively Coupled Argon Plasma Discharges | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Takao, Yoshinori
× Takao, Yoshinori× Matsuoka, Kenji× Eriguchi, Koji× Ono, Kouichi |
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著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 714 | |||||
識別子Scheme | e-Rad | |||||
識別子URI | https://kaken.nii.ac.jp/ja/search/?qm=80552661 | |||||
識別子 | 80552661 | |||||
姓名 | タカオ, ヨシノリ | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19325 | |||||
姓名 | エリグチ, コウジ | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19326 | |||||
姓名 | オノ, コウイチ | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19327 | |||||
姓名 | マツオカ, ケンジ | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 714 | |||||
識別子Scheme | e-Rad | |||||
識別子URI | https://kaken.nii.ac.jp/ja/search/?qm=80552661 | |||||
識別子 | 80552661 | |||||
姓名 | 鷹尾, 祥典 | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19329 | |||||
姓名 | 江利口, 浩二 | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19330 | |||||
姓名 | 斧, 髙一 | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 19331 | |||||
姓名 | 松岡, 健二 | |||||
著者所属 | ||||||
Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University | ||||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | A numerical study of low-pressure capacitively coupled plasma (CCP) discharges in Ar has been performed including the transport of ions in a sheath onto a substrate. We employ a two-dimensional axisymmetric particle-in-cell with a Monte Carlo collision (PIC-MCC) method for an asymmetric capacitive discharge with an external electrical circuit containing a blocking capacitor and an rf power supply. The PIC-MCC results show that for the gas pressure (5-100 mTorr), rf voltage (50?500 V), and frequency (6.78?40.68 MHz) ranges examined for a single-frequency CCP, the peak plasma density increases linearly with gas pressure, rf voltage, and frequency squared. With a decrease in pressure or increases in plasma density and sheath potential, the sheath becomes less collisional and thus significant peaks at high energies of ion energy distributions appear and narrow ion angular distributions are obtained. The tendency is in a reasonable agreement with experimental results. | |||||
書誌情報 |
Japanese Journal of Applied Physics 巻 50, 号 8S1, p. 08JC02, 発行日 2011-08 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00214922 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA12295836 | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa |