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Fabrication of a high-density emitter array for electrospray thrusters using field emitter array process
http://hdl.handle.net/10131/00013278
http://hdl.handle.net/10131/000132781d9aaacb-cc6c-4aa1-8f13-12fede675206
名前 / ファイル | ライセンス | アクション |
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DP18012.pdf (3.8 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2020-05-19 | |||||
タイトル | ||||||
タイトル | Fabrication of a high-density emitter array for electrospray thrusters using field emitter array process | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Naoki, Inoue
× Naoki, Inoue× Masayoshi, Nagao× Katsuhisa, Murakami× Sommawan, Khumpuang× Shiro, Hara× Yoshinori, Takao |
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著者所属 | ||||||
Department of Systems Integration,Yokohama National University,Yokohama,Kanagawa | ||||||
著者所属 | ||||||
National Institute of Advanced Industrial Science and Technology,Tsukuba,Ibaraki | ||||||
著者所属 | ||||||
National Institute of Advanced Industrial Science and Technology,Tsukuba,Ibaraki | ||||||
著者所属 | ||||||
National Institute of Advanced Industrial Science and Technology,Tsukuba,Ibaraki | ||||||
著者所属 | ||||||
National Institute of Advanced Industrial Science and Technology,Tsukuba,Ibaraki | ||||||
著者所属 | ||||||
Minimal Fab Promoting Organization,Tsukuba,Ibaraki | ||||||
著者所属 | ||||||
National Institute of Advanced Industrial Science and Technology,Tsukuba,Ibaraki | ||||||
著者所属 | ||||||
Minimal Fab Promoting Organization,Tsukuba,Ibaraki | ||||||
著者所属 | ||||||
Division of Systems Research,Yokohama National University,Yokohama,Kanagawa | ||||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | To improve the thrust density of electrospray thrusters using ionic liquids as the propellant, we have fabricated a high-density emitter array utilizing the fabrication technique of a field emitter array (FEA) or gated nano electron sources. The density of the emitter array can reach approximately 4 million cm−2, which is four orders of magnitude higher than that of conventional electrospray thrusters. Performing deep reactive ion etching from the back side of the same structure as FEAs and removing their Ni cones by dilute nitric acid, we have successfully fabricated sub-μm scale capillary emitters with self-aligned extractor electrodes and ionic liquid reservoirs behind them. Current measurements were also conducted with EMI-BF4 and EMI-DCA as the propellant. Although the ion was not extracted with EMI-BF4 owing to its electrochemical reaction with the electrodes, both positive and negative ion currents were detected using EMI-DCA, where the current density exceeded that of conventional electrospray thrusters. | |||||
書誌情報 |
Japanese Journal of Applied Physics 巻 58, 号 SE, p. SEEG04-1-SEEG04-7, 発行日 2019-05-24 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00214922 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA12295836 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.7567/1347-4065/ab0fee | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
出版者 | ||||||
出版者 | IOP Science | |||||
関係URI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.7567/1347-4065/ab0fee | |||||
関連名称 | https://doi.org/10.7567/1347-4065/ab0fee |