WEKO3
アイテム
{"_buckets": {"deposit": "0db3f454-a951-4fe8-b26f-c98072af4fb5"}, "_deposit": {"created_by": 3, "id": "7624", "owners": [3], "pid": {"revision_id": 0, "type": "depid", "value": "7624"}, "status": "published"}, "_oai": {"id": "oai:ynu.repo.nii.ac.jp:00007624", "sets": ["496"]}, "author_link": ["30785", "30788", "30780", "714", "30797", "30786", "30782", "30781", "30784", "30787", "30790", "30791", "30792", "30793", "30794", "30796"], "item_2_biblio_info_8": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2016-11-14", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "20", "bibliographicPageEnd": "204101-5", "bibliographicPageStart": "204101-1", "bibliographicVolumeNumber": "109", "bibliographic_titles": [{"bibliographic_title": "Applied Physics Letters"}]}]}, "item_2_description_42": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"subitem_description": "Article", "subitem_description_type": "Other"}]}, "item_2_description_5": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "Effects of initial roughness on the evolution of plasma-induced surface roughness have been investigated during Si etching in inductively coupled Cl2 plasmas, as a function of rf bias power or ion incident energy in the range Ei ≈ 20–500 eV. Experiments showed that smoothing of initially rough surfaces as well as non-roughening of initially planar surfaces can be achieved by plasma etching in the smoothing mode (at high Ei) with some threshold for the initial roughness, above which laterally extended crater-like features were observed to evolve during smoothing. Monte Carlo simulations of the surface feature evolution indicated that the smoothing/non-roughening is attributed primarily to reduced effects of the ion scattering or reflection from microscopically roughened feature surfaces on incidence.", "subitem_description_type": "Abstract"}]}, "item_2_full_name_2": {"attribute_name": "著者(ヨミ)", "attribute_value_mlt": [{"nameIdentifiers": [{"nameIdentifier": "30786", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "中崎, 暢也"}]}, {"nameIdentifiers": [{"nameIdentifier": "30787", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "松本, 悠"}]}, {"nameIdentifiers": [{"nameIdentifier": "30788", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "津田, 博隆"}]}, {"nameIdentifiers": [{"nameIdentifier": "714", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "80552661", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://kaken.nii.ac.jp/ja/search/?qm=80552661"}], "names": [{"name": "鷹尾, 祥典"}]}, {"nameIdentifiers": [{"nameIdentifier": "30790", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "江利口, 浩二"}]}, {"nameIdentifiers": [{"nameIdentifier": "30791", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "斧, 髙一"}]}]}, "item_2_full_name_3": {"attribute_name": "著者別名", "attribute_value_mlt": [{"nameIdentifiers": [{"nameIdentifier": "30792", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "ナカザキ, ノブヤ"}]}, {"nameIdentifiers": [{"nameIdentifier": "30793", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "マツモト, ハルカ"}]}, {"nameIdentifiers": [{"nameIdentifier": "30794", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "ツダ, ヒロタカ"}]}, {"nameIdentifiers": [{"nameIdentifier": "714", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "80552661", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://kaken.nii.ac.jp/ja/search/?qm=80552661"}], "names": [{"name": "タカオ, ヨシノリ"}]}, {"nameIdentifiers": [{"nameIdentifier": "30796", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "エリグチ, コウジ"}]}, {"nameIdentifiers": [{"nameIdentifier": "30797", "nameIdentifierScheme": "WEKO"}], "names": [{"name": "オノ, コウイチ"}]}]}, "item_2_relation_13": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isIdenticalTo", "subitem_relation_type_id": {"subitem_relation_type_id_text": "info:doi/10.1063/1.4967474", "subitem_relation_type_select": "DOI"}}]}, "item_2_source_id_11": {"attribute_name": "書誌レコードID", "attribute_value_mlt": [{"subitem_source_identifier": "AA00543431", "subitem_source_identifier_type": "NCID"}]}, "item_2_source_id_9": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "00036951", "subitem_source_identifier_type": "ISSN"}]}, "item_2_version_type_18": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Nakazaki, Nobuya"}], "nameIdentifiers": [{"nameIdentifier": "30780", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Matsumoto, Haruka"}], "nameIdentifiers": [{"nameIdentifier": "30781", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Tsuda, Hirotaka"}], "nameIdentifiers": [{"nameIdentifier": "30782", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Takao, Yoshinori"}], "nameIdentifiers": [{"nameIdentifier": "714", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "80552661", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://kaken.nii.ac.jp/ja/search/?qm=80552661"}]}, {"creatorNames": [{"creatorName": "Eriguchi, Koji"}], "nameIdentifiers": [{"nameIdentifier": "30784", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Ono, Kouichi"}], "nameIdentifiers": [{"nameIdentifier": "30785", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2017-02-15"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "takao_apl.pdf", "filesize": [{"value": "2.2 MB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 2200000.0, "url": {"label": "takao_apl.pdf", "url": "https://ynu.repo.nii.ac.jp/record/7624/files/takao_apl.pdf"}, "version_id": "f11f39b1-f685-4e3c-a287-0ec1f36a19c1"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Surface smoothing during plasma etching of Si in Cl2", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Surface smoothing during plasma etching of Si in Cl2"}]}, "item_type_id": "2", "owner": "3", "path": ["496"], "permalink_uri": "http://hdl.handle.net/10131/10296", "pubdate": {"attribute_name": "公開日", "attribute_value": "2017-02-15"}, "publish_date": "2017-02-15", "publish_status": "0", "recid": "7624", "relation": {}, "relation_version_is_last": true, "title": ["Surface smoothing during plasma etching of Si in Cl2"], "weko_shared_id": 3}
Surface smoothing during plasma etching of Si in Cl2
http://hdl.handle.net/10131/10296
http://hdl.handle.net/10131/10296c938a722-27d8-4306-bc60-4634524a4f18
名前 / ファイル | ライセンス | アクション |
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takao_apl.pdf (2.2 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2017-02-15 | |||||
タイトル | ||||||
タイトル | Surface smoothing during plasma etching of Si in Cl2 | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Nakazaki, Nobuya
× Nakazaki, Nobuya× Matsumoto, Haruka× Tsuda, Hirotaka× Takao, Yoshinori× Eriguchi, Koji× Ono, Kouichi |
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著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 30786 | |||||
姓名 | 中崎, 暢也 | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 30787 | |||||
姓名 | 松本, 悠 | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 30788 | |||||
姓名 | 津田, 博隆 | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 714 | |||||
識別子Scheme | e-Rad | |||||
識別子URI | https://kaken.nii.ac.jp/ja/search/?qm=80552661 | |||||
識別子 | 80552661 | |||||
姓名 | 鷹尾, 祥典 | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 30790 | |||||
姓名 | 江利口, 浩二 | |||||
著者(ヨミ) | ||||||
識別子Scheme | WEKO | |||||
識別子 | 30791 | |||||
姓名 | 斧, 髙一 | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 30792 | |||||
姓名 | ナカザキ, ノブヤ | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 30793 | |||||
姓名 | マツモト, ハルカ | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 30794 | |||||
姓名 | ツダ, ヒロタカ | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 714 | |||||
識別子Scheme | e-Rad | |||||
識別子URI | https://kaken.nii.ac.jp/ja/search/?qm=80552661 | |||||
識別子 | 80552661 | |||||
姓名 | タカオ, ヨシノリ | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 30796 | |||||
姓名 | エリグチ, コウジ | |||||
著者別名 | ||||||
識別子Scheme | WEKO | |||||
識別子 | 30797 | |||||
姓名 | オノ, コウイチ | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Effects of initial roughness on the evolution of plasma-induced surface roughness have been investigated during Si etching in inductively coupled Cl2 plasmas, as a function of rf bias power or ion incident energy in the range Ei ≈ 20–500 eV. Experiments showed that smoothing of initially rough surfaces as well as non-roughening of initially planar surfaces can be achieved by plasma etching in the smoothing mode (at high Ei) with some threshold for the initial roughness, above which laterally extended crater-like features were observed to evolve during smoothing. Monte Carlo simulations of the surface feature evolution indicated that the smoothing/non-roughening is attributed primarily to reduced effects of the ion scattering or reflection from microscopically roughened feature surfaces on incidence. | |||||
書誌情報 |
Applied Physics Letters 巻 109, 号 20, p. 204101-1-204101-5, 発行日 2016-11-14 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00036951 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00543431 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1063/1.4967474 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | Article |